Technical Performance
·Vertical (Z) Scan Range: < 5 mm
·Vertical (Z) Scan Rate: < 10 mm/sec
·Vertical (Z) Resolution: > 0.1 nm
·Lateral (X, Y) Resolution Range: 0.45 – 11.8 mm
·Field of View Range: 0.04 – 17.5 mm; larger areas can be imaged with field stitching capability
·Step Height Accuracy: < 0.75% (Model 5032)
·Step Height Repeatability: < 0.1% (Model 5032)
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